TGS1F
Grating set TGS1 consists of 4 calibration gratings: TGZ1, TGZ2, TGZ3, TGZ4 and intended for Z and X (or Y) calibration and nonlinearity measurements.
Grating set TGS1 consists of 4 calibration gratings: TGZ1, TGZ2, TGZ3, TGZ4 and intended for Z and X (or Y) calibration and nonlinearity measurements.
TGZ1 — for Z-axis calibration (step height range 20,0±2,0 nm) and nonlinearity measurements
TGZ2 — for Z-axis calibration (step height range 110,0±10 nm) and nonlinearity measurements
TGZ3 — for Z-axis calibration (step height range 520 ± 20 nm) and nonlinearity measurements
TGZ4 — for Z-axis calibration (step height range 1517 ± 20 nm) and nonlinearity measurements