Grating set TGS1 consists of 4 calibration gratings: TGZ1, TGZ2, TGZ3, TGZ4 and intended for  Z and X (or Y) calibration and nonlinearity measurements.

• TGZ1 — for Z-axis calibration (step height range 20,0±2,0 nm) and nonlinearity measurements
• TGZ2 — for Z-axis calibration (step height range 110,0±10 nm) and nonlinearity measurements
• TGZ3 — for Z-axis calibration (step height range 520 ± 20 nm) and nonlinearity measurements
• TGZ4 — for Z-axis calibration (step height range 1517 ± 20 nm) and nonlinearity measurements